Sigma specifikációk
Sigma specifikációk
| SIGMA LITE | SIGMA | SIGMA W12 | SIGMA MAG | SIGMA HF | |
|---|---|---|---|---|---|
| FORCE SENSORS | |||||
| Revolving Measurement Unit (RMU) up to 6 sensors (kgf) | 100 | 200 | 10 | 200 |  |
| Single Measurement Unit (SMU) 1 sensor up to (kgf) | 100 | 200 | 10 | 200 | 1000 |
| STAGES | |||||
| X-stage (mm) | 168 | 370 | 500 | 600 | 500 |
| Y-stage (mm) | 168 | 168 | 370 | 168 | 500 |
| Z-stage (mm) | 168 | 168 | 90 | 168 | 200 |
| Axis speed (mm/s) | 5 | 50 | 50 | 50 | 500 |
| Resolution linear encoders (backlash free drives) (nm) | 30 | 30 | 30 | 30 | 10 |
| Digital temperature correction |  |
|
|
|
|
| ACCURACY | |||||
| Accuracy (%) | 0.2 | 0.075 | 0.075 | 0.075 | 1 |
| ADC resolution (bit) | 16 | 24 | 24 | 24 | 24 |
| Sampling frequency (kHz) | 2 | 10 | 10 | 10 | 10 |
| Shear height (step back) accuracy ±1 μm | |
|
|
|
|
| Programmable landing force down to 5 gf | |
|
|
|
|
| 1° sensor rotation resolution | |
|
|
|
|
| Tool rotation accuracy ±10 µm (incl. software ±5 µm) | |
|
|
|
|
| ACCESSORIES | |||||
| High resolution cameras | 3 | 3 | 3 | 3 | |
| Head mounted cameras (no tool-camera-offset) | |
|
|
|
5 |
| Ergonomic SEMI S2 safety cabinet | |
 |
|
|
|
| Blower and vacuum tool cleaning unit | |
|
|
|
|
| CBP Jaw Cleaner (contactless) | |
|
|
|
|
| SOFTWARE | |||||
| Supports Microsoft Windows | |
|
|
|
|
| Easy to learn intuitive graphical user interface | |
|
|
|
|
| Minimum number of mouse clicks | |
|
|
|
|
| Customizable screens | |
|
|
|
|
| Integrated report editor and data export | |
|
|
|
|
| Easy data sorting, grouping and filtering | |
|
|
|
|
| Integrated SPC and system GR&R analysis | |
|
|
|
|
| Multiple languages, multiple user network environment | |
|
|
|
|
| Export to PDF, XML, XLS, DOC, and more | |
|
|
|
|
| SECS/GEM* | |
|
|
|
|
| SERVICES | |||||
| Correlation with other bond testers | |
|
|
|
|
| Ergonomic layout to SEMI S8 | |
|
|
|
|
| CE + EMC compliant | |
|
|
|
|
| ISO9001, ISO13485 and ISO14001 certified production | |
|
|
|
|
| Calibration jigs and weights (OIMI class M1, NIST class 1) | |
|
|
|
|
| 1 Phase 100-240VAC 1+N+PE 45-64Hz 5A | |
|
|
|
|
| 3 Phase 207-528VAC 3+N+PE 50-60Hz 8A | |
|
|
|
|
| Compressed air required | |
|
|
|
|
| MECHANICAL | |||||
| Footprint X (mm) | 620 | 620 | 1300 | 1800 | 1200 |
| Footprint Y (mm) | 558 | 558 | 935 | 900 | 1200 |
| Height (mm) | 608 | 608 | 608 | 1100 | 2500 |
| Weight (± kg) | 80 | 80 | 100 | 160 | 1350 |